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SEMI E195-0925 - Test Method Using Adhesive Replacement ..

SEMI E195-0925 - Test Method Using Adhesive Replacement Substrates to Assess Particulate Surface Contamination on Critical Chamber Components


Jedex Inc. registered a patent for an adhesive extraction method extraction material and a particle counter using it about 10 years before the SEMI E195 standard was established, started sales, and continues to supply high-efficiency devices and materials.

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