- SPro (Auto focus, fast scan)
- SPro Series ~ 100 mm samples
SPro3 Series
SPro3 series is a device that detects and counts foreign substances and particles present on the Glass, surface and inner layers of transparent or translucent films (OCA films, polarized films, etc.)
This device has excellent particle detection performance and very fast detection speed by applying patent registered new concept detection technologies developed by Jedex Inc.
- Model / detection limit(um)
SPro305 : 5 ~ 5000
Sample Size: 100 x 100 mm max
This device has excellent particle detection performance and very fast detection speed by applying patent registered new concept detection technologies developed by Jedex Inc.
- Model / detection limit(um)
SPro305 : 5 ~ 5000
Sample Size: 100 x 100 mm max
Fully Automated Surface Particle Counter for max 100mm x 100 mm samples
It is controlled by a computer and a recipe can be prepared and used to specify the conditions for each step of the test so that the various samples can be evaluated and the various requirements of the user can be met
As a result, the testable samples are Sticky Films, OCA Films, Polarizing Films, Optical Films, Glasses (Circle wafers, plates), etc. and may be added or reduced depending on the shape and size of the sample.
As a result, the testable samples are Sticky Films, OCA Films, Polarizing Films, Optical Films, Glasses (Circle wafers, plates), etc. and may be added or reduced depending on the shape and size of the sample.
SPro3 Surface Particle Counters –Technical Specification
.Smart Focusing
Counting Channels: Adjustable by system set file
Dimension (mm) ;441(w)x 900(d) x630(h)
Weight; 35kg (main body)
Operating Temperature
20 ~ 30 Degree C (20 ~ 25 Degree C recommended)
Operating Humidity
30 ~ 60 % RH (40 ~ 55 % RH recommended)
Counting Software ; ParticlePro®
Accessories
Sample Holder for DD200HR, DD500HR Films(30x70mm) - Loading: 3 Films/Load
Sample Holder for 2inch(50mm) circle wafers
Sample Holder for 4inch(100mm) circle wafers
Warranty
1 Year from outgoing date
Related Standards
SEMI E195-0925 - Test Method Using Adhesive Replacement Substrates to Assess Particulate Surface Contamination on Critical Chamber Components
ASTM E1216-21 – Standard Practice for Sampling for Particulate Contamination by Tape Lift
ISO 14644-17:2021 - Particle deposition rate applications
ISO 14644-9:2022 - Assessment of surface cleanliness for particle concentration
IEST STD-CC1246E - Product Cleanliness Levels - Applications, Requirements, and Determination
IEST-RP-CC005: Gloves and Finger Cots Used in Cleanrooms and Other Controlled Environments
Counting Channels: Adjustable by system set file
Dimension (mm) ;441(w)x 900(d) x630(h)
Weight; 35kg (main body)
Operating Temperature
20 ~ 30 Degree C (20 ~ 25 Degree C recommended)
Operating Humidity
30 ~ 60 % RH (40 ~ 55 % RH recommended)
Counting Software ; ParticlePro®
Accessories
Sample Holder for DD200HR, DD500HR Films(30x70mm) - Loading: 3 Films/Load
Sample Holder for 2inch(50mm) circle wafers
Sample Holder for 4inch(100mm) circle wafers
Warranty
1 Year from outgoing date
Related Standards
SEMI E195-0925 - Test Method Using Adhesive Replacement Substrates to Assess Particulate Surface Contamination on Critical Chamber Components
ASTM E1216-21 – Standard Practice for Sampling for Particulate Contamination by Tape Lift
ISO 14644-17:2021 - Particle deposition rate applications
ISO 14644-9:2022 - Assessment of surface cleanliness for particle concentration
IEST STD-CC1246E - Product Cleanliness Levels - Applications, Requirements, and Determination
IEST-RP-CC005: Gloves and Finger Cots Used in Cleanrooms and Other Controlled Environments
