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Equipment Parts Cleanliness Testers/Cleaners(Sub Micron,nano)

ParticlePro M2000

Particle Pro 7 V1 - 2 Bodies

ParticlePRO7

M2000ESC.Electro static chucks

ParticlePro M3000 - Particle Test - Shower Head, Electrode, Rings, Chucks

Nanox 1000 - Wet

Equipment Parts Cleanliness Testers/Cleaners(Sub Micron,nano)


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Products List

ParticlePro M2000

Particle Detection/Clean System for Shower Heads, Electrodes - Semiconductor FAB equipment

FAB Equipment's Parts Cleanliness

Particle Pro 7 V1 - 2 Bodies

Particle Pro & V1 - Particle tester for focus rings, electrodes, surface parts

ParticlePRO7

Particle Counting System - Focus rings and surface parts of semiconductor equipment

FAB Equipment's Parts Cleanliness

M2000ESC.Electro static chucks

Particle testing and cleaning for ESC(Electro static chucks)

FAB Equipment's Parts Cleanliness

ParticlePro M3000 - Particle Test - Shower Head, Electrode, Rings, Chucks

M3000 - Particle testing - Semiconductor Equipment parts- Particle Test - Shower Head, Electrode, Rings, Chucks

FAB Equipment's Parts Cleanliness

Nanox 1000 - Wet

Nanox 1000 - Wet type parts cleanliness inspection device, can test most parts

FAB Equipment's Parts Cleanliness , Samplers

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