M7000 – New Product Launch in 2025

The M7000 is a device developed by JEDEX to evaluate the cleanliness of various semiconductor FAB equipment components.
It surpasses the advantages of previously developed and supplied JEDEX devices, offering more precise, faster, and more convenient inspection by integrating JEDEX’s advanced technology.


A. Inspectable Samples

1. Particles inside holes of shower heads, electrodes
2. Surface particles on ESC (Electro Static Chuck), focus rings
3. Sputtering targets
4. FOUP (Front Opening Unified Pod)
5. Ceramic parts
6. Metal parts
7. Inner surfaces of packaging materials and other cleanroom-related items (optional)



B. Advantages

1. Superior detection sensitivity and resolution compared to conventional surface particle counters and chamber-type systems
2. Non-contact inspection method with particle diffusion prevention, ensuring no cross-contamination during testing
3. Recipe customization for different sample types, enabling precise and rapid inspection
4. Fully automated system: simply load the sample, and the device handles inspection and reporting
5. Particle Mapping: displays particle concentration by location and section of each component
6. Ability to specify inspection and non-inspection areas in detail, enabling faster testing and preventing waste of inspection gas
7. Provides a variety of reporting formats


For more detailed specifications, please contact us.