FAB Equipment's Parts Cleanliness
You can choose depending on the particle size and type of part you wish to manage.
M2000, M3000, ParticlePro7: 10nm, 0.1um, 0.3um ~
The S series (SA, SPro, etc.) uses particle collection films (strips) to collect and count particles on the surface of parts and detect large foreign substances larger than 0.5 um or 1 um.
To choose the right product for your needs and budget
If you need expert advice, please contact us
Products List
Wide Detector & High Performance, For small to large size (~ 300 mm) samples
Materials(Glass,CG. OCA, Films, Trays) , Surface Particles , Falling(Fallen) Particles , Process Monitoring , Silicon Wafers (Bare, Coated) , Glass, Glass Wafers , Films , Trays, Carriers , Metal Surfaces , Particle Testing (Equipment,Tray, Carrier, Magazine ) , Particle Testing (Cleanroom, Supplies) , Metallic Particles Counting , Metallic Particle Detection , FAB Equipment's Parts Cleanliness , Particles on PCBs , Equipment's Parts Cleanliness , Equipments Cleanliness , Inks, Photoresists, Waters , Liquids, Cleaning Bath , Process particle monitoring , Semiconductor Packaging , Testing
SPro Series ~ 100 mm samples
Equipments Cleanliness , Falling(Fallen) Particles , Surface Particles , Process Monitoring , Glass, Glass Wafers , Trays, Carriers , Particle Counting , Films , Particle Testing (Cleanroom, Supplies) , Particle Testing (Equipment,Tray, Carrier, Magazine ) , Metallic Particles Counting , Metallic Particle Detection , FAB Equipment's Parts Cleanliness , Equipment's Parts Cleanliness , Inks, Photoresists, Waters , Liquids, Cleaning Bath , Materials(Glass,CG. OCA, Films, Trays) , Process particle monitoring , Semiconductor Packaging , Testing
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