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Materials(Glass,CG. OCA, Films, Trays)

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S5 Series

SA (Auto Scan, Smart Counting)

S350LA

SPro (Auto focus, fast scan)

SM Series

Materials(Glass,CG. OCA, Films, Trays)

Detection of particles attached to the tray and protective film involves collecting particles using a dedicated particle collection film (adhesive, Maker: Jedex) and then counting the particles collected on the surface of the film.

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OCA Films, Cover Glass - 290mm x 200 mm area /count

Materials(Glass,CG. OCA, Films, Trays) , Films , Glass, Glass Wafers , Process particle monitoring

S5 Series

FAB Equipment's Parts Cleanliness , Wafer Foups, Carriers, Shoe Boxes , Tray, Bags , Semiconductor Packaging , Testing , SEMI E195-0925 - Test Method Using Adhesive Replacement .. , Particle Testing (Cleanroom, Supplies) , Cleaning(Equipment,Tray, Carrier, Magazine) , Particle Testing (Equipment,Tray, Carrier, Magazine ) , Liquids, Cleaning Bath , Equipments Cleanliness , Materials(Glass,CG. OCA, Films, Trays) , Equipment's Parts Cleanliness , OLEDoS Processing , Process particle monitoring , Cleaning(Equipment,Tray, Carrier ..)

SA (Auto Scan, Smart Counting)

Wide Detector & High Performance, For small to large size (~ 300 mm) samples

Materials(Glass,CG. OCA, Films, Trays) , Surface Particles , Falling(Fallen) Particles , Process Monitoring , Silicon Wafers (Bare, Coated) , Glass, Glass Wafers , Films , Trays, Carriers , Metal Surfaces , Particle Testing (Equipment,Tray, Carrier, Magazine ) , Particle Testing (Cleanroom, Supplies) , Metallic Particle Detection , Inks, Photoresists, Waters , Process particle monitoring

S350LA

S350LA: Surface Particle Counter for Wide Area Samples

Particle Testing (Cleanroom, Supplies) , Cleaning(Equipment,Tray, Carrier, Magazine) , Particle Testing (Equipment,Tray, Carrier, Magazine ) , Liquids, Cleaning Bath , Equipments Cleanliness , Materials(Glass,CG. OCA, Films, Trays) , Equipment's Parts Cleanliness , OLEDoS Processing , Cleaning(Equipment,Tray, Carrier ..) , Process particle monitoring

SPro (Auto focus, fast scan)

SPro Series ~ 100 mm samples

Falling(Fallen) Particles , Surface Particles , Process Monitoring , Glass, Glass Wafers , Trays, Carriers , Particle Counting , Films , Particle Testing (Cleanroom, Supplies) , Particle Testing (Equipment,Tray, Carrier, Magazine ) , Metallic Particle Detection , FAB Equipment's Parts Cleanliness , Equipment's Parts Cleanliness , Inks, Photoresists, Waters , Materials(Glass,CG. OCA, Films, Trays) , Process particle monitoring

SM Series

Portable Surface Particle Counter

Particle Testing (Cleanroom, Supplies) , Cleaning(Equipment,Tray, Carrier, Magazine) , Particle Testing (Equipment,Tray, Carrier, Magazine ) , Liquids, Cleaning Bath , Equipments Cleanliness , Materials(Glass,CG. OCA, Films, Trays) , Equipment's Parts Cleanliness , OLEDoS Processing , Cleaning(Equipment,Tray, Carrier ..) , Process particle monitoring

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