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ParticlePRO7
Particle Counting System - Focus rings and surface parts of semiconductor equipment
ParticlePRO7

ParticlePRO7 is a counting system that uses a robust, sophisticated particle-separating system with a patented structure to separate and count the particles attached to diverse surfaces.

 It was developed based on 20 years of development know-how of JEDEX and on 30 years of field experience of the developers. 

The patent application was submitted and registered in 2018.

1.It is a surface particle counting system that detects particles above 0.1um in size.

2.It features a strong surface particle separation/detection function never displayed by pre-existing systems.

3.It is capable of detecting and counting the particles on diverse types of surfaces(equipment part, equipment surface, diverse materials, etc.).

4.It supplies a particle sampling unit that reacts to diverse sample shapes.

5.All the test processes are automated.

6.It is comprehensively applicable to the cutting-edge fields of semi-conductor, display, and precision electronics.


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