- ParticlePRO7
- Particle Counting System - Focus rings and surface parts of semiconductor equipment
ParticlePRO7 is a counting system that uses a robust, sophisticated particle-separating system with a patented structure to separate and count the particles attached to diverse surfaces.
It was developed based on 20 years of development know-how of JEDEX and on 30 years of field experience of the developers.
The patent application was submitted and registered in 2018.
1.It is a surface particle counting system that
detects particles above 0.1um in size.
2.It features a strong surface particle
separation/detection function never displayed by pre-existing systems.
3.It is capable of detecting and counting the
particles on diverse types of surfaces(equipment part, equipment surface,
diverse materials, etc.).
4.It supplies a particle sampling unit that reacts to
diverse sample shapes.
5.All the test processes are automated.
6.It is comprehensively applicable to the cutting-edge
fields of semi-conductor, display, and precision electronics.