Shower Heads, Rings

M7000/M1000R25 (new)

Parts cleanliness and particle testing system for Shower Heads, Electrodes, ESC, Chucks, Robot Arms, Focus rings, Cleanroom Wipers, FOUPs ..,

Semiconductor Packaging , Testing

SPro (Auto focus, fast scan)

SPro Series ~ 100 mm samples

Semiconductor Packaging , Testing

SA (Auto Scan, Smart Counting)

Wide Detector & High Performance, For small to large size (~ 650 mm) samples

Cleaning(Equipment,Tray, Carrier ..)

S5 Series

Integrated Systems

S300 Series

Surface/Glass Particle Counter