- Symm9-AS Cleaner
- Surface particle removal system
Equipment overview
Symm9-AS is an equipment that sprays a powerful gas (air) jet on the product surface, product grooves, and product hole surfaces to remove particles with powerful removal performance, and detects particles separated from the product surface during the cleaning process.
When connecting the Particle Counter, cleaning can be performed while determining the
degree of cleaning, enabling accurate cleaning.
Symm9-AS application field
⚫ Inner surface and surface of various equipment.
⚫ Trays, Carriers
⚫ Clean room gloves, cleanroom suits, garments
⚫ Surfaces of chambers and product contact areas of manufacturing and inspection devices
⚫ Cleaning and removing foreign substances inside various exhaust ports and ducts.
⚫ Surface final during PM of manufacturing equipment
⚫ Cleaning of the inside of the semiconductor manufacturing carrier and FOUP
⚫ Protective film for display manufacturing substrates
⚫ Inner surface and surface of various packaging materials
⚫ Semiconductor memory module tray
⚫ Various jigs
⚫ Cleanroom floors, walls
⚫ In addition, it can be applied to various fields.
In order to respond to various needs, it is necessary to apply various types of SymmGun suitable for
the sample to be cleaned as needed. Please consult with JEDEX in advance.
Testing techniques and principles
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SymmGun® is a powerful gas sprayed from a symmetrical jet nozzle at a certain distance (within 5 mm, recommended near 0 mm) from the surface to be cleaned, which separates particles and various foreign substances present on the surface and grooves and focuses them on the center. Gas is sprayed from the direction guide nozzle and discharged through the outlet. As gas is sprayed, the surrounding pressure is lowered, creating a vacuum on its own, and the vacuum generated by the spray direction of the symmetrical nozzle also collects surrounding particles.
As a result, there is a strong jet cleaning effect and the particles separated as a result of cleaning do not spread to the surrounding area. (patented)
