- Inspection of particle from parts of semiconductor manufacturing equipment/ cleaning complex device

   Hole forming parts (Shower Head and Cathode, etc.)

- Realization of close to zero in the background particle level

- Easy to change the flow of fluid using the pressurized spraying mode/ absorption mode/ combination mode

- Easy to set and adjust the condition for each sample by applying the computer recipe

- Control of auto loading/unloading/nozzle height

  * The specification above and the image of product are subject to change for improvement without any prior notice.